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ISO - International Organization
for Standardization

 

Absorption – The process involving the penetration of a gas or vapor beyond the surface of a solid or liquid, usually by some kind of diffusion and its subsequent binding or capture.
 
Absolute Pressure – The sum of atmospheric and gauge pressures, it is the total force per unit area exerted by a fluid and the pressure above a perfect vacuum (zero pressure) in vacuum systems. U.S. units for absolute pressure are pounds per square inch absolute (psia).
 
Adsorption – Gas or vapor bonding on, or “sticking” to, a solid or liquid surface.
 
Air Intake Filter – Device installed at the intake port of a compressor or vacuum pump that is used to capture insoluble contaminants from a fluid with porous material.
 
Anneal – A vacuum heat treatment process in which a material is relaxed and uneven or heterogeneous regions of a substrate, which result from the application of internal stress, are homogenized.
 
Atmosphere – Unit of pressure that will sustain a column of mercury of 29.92” at 0°C, sea level. Actual daily atmospheric pressure fluctuates about this value.
 
Atmospheric Pressure – Pressure exerted by the atmosphere in all directions, equal at sea level to about 14.7 psi. Also the force exerted on a unit area by the weight of the atmosphere.
 
Back Pressure – Resistance to flow in the system.
 
Backstreaming – The movement of the vapor of the operational fluid of a pump in the direction of the area being depleted.
 
Baffle – A system of cold surfaces placed between the inlet of a pump and the area on which it is pumping to condense backstreaming vapor and return it to the pump.
 
Bake-out – The heating of vacuum system components during the pumping process for the purpose of degassing. The bake-out process increases the evolution of adsorbed and absorbed gases.
 
Barometer – Mechanism for calculating atmospheric pressure, given in inches of mercury (in. Hg) at a precise point.
 
Baseplate – A plate that supports a belljar along with its enclosed materials or components subjected to a vacuum, providing mechanical, electrical and other connections to components within the vacuum system.
 
Belljar – A cylindrical vacuum compartment with a detachable seal supported by a baseplate.
 
Cathode – The negative electrode in an electron device. A cathode is the most negative electrode in an ion pump, which can discharge electrons and accumulate positive ions.
 
Check Valve – A two-way directional valve that allows free flow in one direction and blocks flow in the other direction. Check valves can act as either directional or pressure control apparatuses. (http://www.check-valves.net)
 
Condensation – The process of a vapor becoming a liquid or solid.
 
Conductance – Under steady-state conservative conditions, the ration of throughput to the pressure differential between two specified cross sections inside a pumping system.
 
Cross-over Pressure – The pressure at which pumping is transferred from one pump to another, providing a higher speed and/or a lower pressure.
 
Degassing – The deliberate removal of gas from a material, usually done by heating the material under vacuum.
 
Dessicant Dryer – An absorption material that eliminates moisture from air.
 
Differential Pressure Switch – Switch with a low-pressure and high-pressure adjustment. Fluid pressure activates an electric switch to perform work. (http://www.pressure-switches.net)
 
Diffusion – The process of particles moving from an area of higher concentration to one of lower concentration.
 
Displacement – Meaningful only in positive displacement compressors, the entire volume that is swept by the repetitive motion of the pumping element. Displacement per revolution depends on the size of the pumping chamber or chambers, and displacement per minute is determined by compressor speeds.
 
Feedthrough – Also known as “pass-through,” it is a device used to transmit electrical current, fluids or mechanical motion through the walls of a vacuum system.
 
Flow Rate – A measurement of the amount of fluid at a point per unit of time, commonly represented by cubic feet per minute (cfm).
 
Fluid Power – Energy controlled and transmitted through utilization of a pressurized fluid within an enclosed circuit.
 
Gauge Pressure (psig) – A measurement of the force per area applied by a fluid with atmospheric pressure as the zero reference.
 
Head – Often used to indicate gauge pressure, this is energy per pound produced by pressure, elevation or velocity. Expressed in linear units, it is the height of a column or body of fluid above a given point.
 
Hydrostatic Pressure – The exertion of pressure in all directions equally at points within an enclosed gas or liquid at rest.
 
Ionization – A process that occurs by adding or removing electrons to or from an atom or molecule, resulting in the formation of ions.
 
Isothermal – Expansion or compression of a gas at a constant temperature. Practically, this is a slow process because of the time required to replace heat absorbed by expansion or to remove heat generated by compression.
 
Kinetic Energy – Energy due to motion that is added to a fluid either by rotating it at a high speed or by providing a catalyst in a direction of flow.
 
Laminar Flow – Gas flow of adequate velocity so the gas will flow efficiently over surface obstructions and defects.
 
Lubricator – Pneumatic component that lubricates through the injection atomized oil into the air stream.
 
Manometer – An instrument used to measure the pressure of vapors and gases.
 
Maximum Vacuum Rating – Highest level of vacuum recommended for a vacuum pump.
 
Mean Free Path – The average distance a gas molecule moves without interacting with a surface or another molecule.
 
Negative Gauge Pressure – Also called “gauge vacuum” or “vacuum level,” it is the pressure drop that results from the system emptying, measured in inches of mercury (in. Hg.). Negative gauge pressure is a term that must be carefully used, because absolute negative pressure does not exist.
 
Nude Gauge – A vacuum gauge intended to be inserted into a vacuum system that does not have its own envelope.
 
Open Capacity – The volume of air exhausted per minute, expressed in cfm, when there is no pressure or vacuum load on the pump.
 
Outgassing – The process of evaporation that substances, such as oil and dirt, undergo after being placed in a low-pressure or vacuum environment.
 
Permeation – The movement of gas through a solid. The process always involves diffusion through the solid and may involve surface phenomena such as dissociation, sorption, desorption and migration.
 
Pneumatic Fluid Power – The energy that is controlled and transmitted within an enclosed circuit by use of a pressurized fluid.
 
Positive Gauge Pressure – The difference in pressure above atmospheric pressure.
 
Pressure – Force per unit area impacting a surface, typically expressed in pounds per square inch (psi) or in MegaPascals (Mpa).
 
Pressure Switch – An electrical switch controlled by fluid pressure.
 
Psia (Pounds per Square Inch Absolute) – Pressure measured from a state of complete absence of air.
 
Psig (Pounds per Square Inch Gauge) – Pressure above or below (vacuum) atmospheric pressure.
 
Quick Exhaust Valve – A valve that releases air directly to the atmosphere, bypassing the directional valve, which reduces backpressure resistance.
 
Receiver Tank – Container in which gas is stored under pressure or vacuum as a source of pneumatic fluid power. Receiver tanks accommodate sudden or unusually high system demands, prevent frequent on/off cycling of an air compressor or vacuum pump and absorb pulsations.
 
Residual Gas Analyzer – Also referred to as a “partial pressure analyzer” or “partial pressure gauge,” it is a device for measuring the amounts and species of various gases present in a vacuum chamber.
 
Residual Gas – Gas remaining in the vacuum chamber after pump-down.
 
Safety Valve – A valve that opens to its full capacity to provide a rapid and large reduction in pressure when a predetermined value is exceeded.
 
Sight Ports – Holes covered with the glass through which the inside of a vacuum system may be observed.
 
Solid-state – Any element that controls current without moving parts, heated filaments or vacuum gaps.
 
Sorption – A generic term used to describe the uptake of a gas or vapor by a solid without distinction as to whether the process occurs by adsorption and/or absorption.
 
Standard Air – Air at a temperature of 68°F, a pressure of 14.7 psia and a relative humidity of 36%.
 
Standard Temperature and Pressure (STP) – Also referred to as “standard operating conditions,” it is a term referring to the temperature and pressure to which all values are referenced for comparison. STP is generally 760 mm Hg (1 atm), 25°C.
 
Surface Damage – The physical changes of a surface structure to states of less regularity or symmetry, or the chemical changes in its composition.
 
Torr – A unit of pressure equal to 1/760th of a standard atmosphere.
 
Trap – A device used to capture and retain vapors and gases on cold and/or adsorbent surfaces.
 
Turbulent Flow – Gas flow that is not laminar at high pressures and velocities.
 
Vacuum – A space of air or other gas that is less than atmospheric pressure, expressed in inches of mercury (in. Hg).
 
Vacuum Chamber – The enclosure or container that is evacuated and in which the process or experiment is performed.
 
Vacuum Gauge – An instrument for determining gas pressure below atmospheric pressure.
 
Vacuum Rated Capacity – The cfm of free air exhausted by a vacuum pump at rated speed. Usually given for vacuums ranging from 0 in. Hg to the maximum vacuum rating.
 
Vacuum Relief Valve – A valve that operates to provide a modulated flow of atmospheric air into the system to control vacuum level of the system.
 
Vacuum System – A total assembly, comprised of vacuum pumps, valves, chambers, lines and monitoring instruments, used to conduct a vacuum process or experiment.
 
Vapor Pressure – A fixed value that typically refers to the saturated vapor pressure at a specific temperature for all substances.
 
Viscosity – The resistance to flow of a fluid when subjected to pressure.
 
Viscous Flow – The flow of gas, which may be turbulent or laminar, through a channel under conditions such that the mean free path is very small in comparison with the smallest dimension of a transverse section of the channel. At these pressures, the flow characteristics are determined mainly by collisions between the gas molecules.
 
Volumetric Efficiency – Also known as “volumetric ratio,” it is the ratio of the actual delivery of a pump to its calculated delivery multiplied by 100%.

 

 
       
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